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Electron Optics Columns Design & Computation
The design of electron optical elements (electrostatic and magnetostatic lenses, immersion lenses, electrostatic mirrors, electrostatic and magnetic deflectors, stigmators, etc.) used in electron microscopes is based on accurate computations of electrostatic and magnetostatic fields and their impact on the electron beam.
We use FEM programs to investigate the fields. Analytical and raytracing methods are utilized to determine the basic properties and aberrations of the optical elements. Having obtained these data, one can optimize the optical elements design to reach required properties and minimize aberration coefficients.
The following figure shows a visual output of our raytracing program that simplifies getting all the basic properties of sets of rotationally symmetric lenses (for example immersion lenses).
