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Specimen Manipulator RHM-100
The manipulator has been designed to enable required 2" Si wafer specimen movements and heating in UHV.
The whole set contains a mechanical part and control unit.
Mechanical part
Compact solution of the manipulator column placed on revolving DN100CF flange provides two independent rotations transferred in to the vacuum via one "cat tail". One of them is used for turning the specimen area to face it towards different flanges of the UHV apparatus – rotation around manipulator axis in range 0° to 300°.
The other rotation is used for continual rotation of the specimen around its axis, being driven from "outside", alternatively manually or by means of a DC motor, which is controlled automatically by the control unit. The manipulator column can be centred (x–y shift) and its movement along manipulator flange (z shift) is also possible.
Specimen temperature is controlled and stabilised automatically by the control unit, the required values can be set, in addition to the room temperature (RT), in the range from +200 °C to +1200 °C in 5 °C steps. If automatic specimen rotation is enabled the available temperature range encompasses the RT and a +200 °C to +1000 °C interval.
The control unit is the electronic part of the manipulator operating temperature control, specimen rotation control and pyrometer measurements.
Technical Specification
base | rotatable flange DN100CF |
specimen size | 2" diameter |
x–y shift (in plane perpendicular to z axis = manipulator flange axis) | ±5 mm |
z shift (along z axis) | ±10 mm |
secondary rotation of the sample (around specimen axis) | continous, realized either manually or by a DC motor |
primary rotation (around z axis) | +90°, -180° |
dimensions | |
– length | 420 mm |
– diameter | 152 mm |
weight | 7 kg |
specimen temperature range | RT and from +200 °C to +1200 °C |
setting step | 5 °C |
specimen temperature measurement accuracy | ±15 °C |
thermocouple measurement accuracy | ±2 °C |
thermocouple type | Pt10Rh–Pt |
specimen rotation range | 200 to 1400 mHz |
– setting step | 200 mHz |
specimen rotation measurement accuracy | 10 mHz |
pyrometer constant range | 120 °C to 180 °C / V |
– setting step | 1 °C / V |
temperature control process | automatic |
rotation control process | automatic |
display | alphanumeric LCD, 2 lines |
mains voltage | 220 V / 50 Hz |
maximum power consumption | 750 W |
maximum heating power consumption | 600 W |
protection | IP40 |
dimensions (w×h×d) | 528×150×340 mm |
weight | 21 kg |